Cryopumps Standard Service: Repairs and Refurbish Cryogenic Pumps

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Cryopumps Standard Service:
Repairs and Refurbish Cryogenic Pumps

We provide a comprehensive repair and maintenance service for most cryogenic pumps available on the market, including the following brands:  

Product Brands: 


• CTI Torr / CTI On-Board 

• ULVAC SHI-APD 

• Balzers Genesis Varian

• EBARA (depending on condition) 

• Leybold 

Cryogenic systems operate in the field of low-temperature technology, or cryogenics, which involves temperatures below 123 Kelvin. At these extreme temperatures, the thermodynamic behavior of particles changes significantly. Cold surfaces can condense gases, binding them to the cooled surface (surface binding). Non-condensable gases are adsorbed at low temperatures using activated carbon.
810-00422X CRYO PUMP 250F - V810
810-00422X CRYO PUMP 250F - V810
Standard Cryopump Repair Procedure: 
  • Disassemble the cold head, clean, refurbish, adjust valves and valve clearance.
  • Reassemble with new components: O-rings, seals, bushings, bearings, aeroquips.
  • Disassemble the displacer, clean lead shot if needed, bake out displacer and lead shot, replace seals, and reassemble.
  • Polish cold fingers. Disassemble the pump body, clean it thoroughly, restore clearances and recoat internal surfaces if necessary.
  • Replace the carbon element (15K condenser array) and resurface if required.
  • Reassemble the full pump.
  • Perform vacuum and leak (sniff) tests.
  • Run a 24-hour performance test with a compatible compressor.
  • For on-board models: reset the module, replace the backup battery, and check the RS interface.
  • Deliver the pump sealed; if requested, it can be pre-evacuated with a blind flange.
  • A full test report is included.

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