SMG Technology Innovations | Endura, Centura, Producer solutions

SMG Technology Innovations gots over 25 years of experience in semiconductor industry, process solutions for microstructuring applications, semiconductor equipment and spare parts.
"Ad hoc solutions to increase production standards and quality of life."

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A company born to support Semiconductor Industries in the various production areas.

With a Core business focused on Spare parts for semiconductor industries: AMAT 150mm, P5000 AMAT 200mm, SEZ, SPXX, Endura / DxZ / Producer / HDP / DPS / MxP / CMP, AMAT 300mm CMP / Producer SE, Clusterline - Evatec® and many other equipments. Through years of experience we have developed a database and knowledge of most equipment in the Market, we can cross reference most second source part number for industrial automations that feed your wafer production.

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SMG Technology Innovations operates a range of services, to help our customers find the right part and to get their high value items, spare parts repaired or second source.

• Search online by part number or name, using the search engine below,
• View the available OEM parts, alternative qualified parts, and any repairs available,
• Contact SMG directly for a quotation, or email us to source what you cannot find.

wdt_ID	P/N	Description
1	0015-09055	Susceptor Lift Bellows
2	0015-09056	Wafer Lift Bellows
3	0020-06047	Bearing, Throttle Valve
4	0020-06048	Bearing, Throttle Valve
5	0020-10811	Pipe, Insulator, Vespel
6	0020-22413	Slit Valve Bellows
7	0020-31628	Ring, Insulator, Ardel 100
8	0020-33785	Gas Dist Plate 64 Holes
9	0021-01004	Screw, Face Plate, AL
10	0021-01568	Scr, BlockerPlt, Bright-Dip
	P/N	Description

P/N	Description	Documentation
839-250568-001	Bellows Lower Electrode
CMP - PVA - 027	DSS
CMP - PVA - 032	All On Trak
713-027299-002	Adapter
839-070842-004	Assy, Stud, Socket
839-086924-021	Assy, Stud, Socket (M)
839-086924-020	Assy, Stud, Socket (S)
715-011913-080	Baffle Lower, Plate
715-011925-001	Bolt, Capped Clamp
715-011927-001	Bolt, Capped Clamp
716-011981-001	Bottom, Plunger
713-011926-001	Cap, Clamp Bolt (Kel-f)
713-011928-001	Cap, (Kel-f)
715-011982-001	Cap, Plngr, Al, Anodized
713-11926-001-V	Cap, Screw, Vespel
713-330311-001	Clip, BAC, Vespel
713-330701-001	Cone, BAC
713-028487-001	Confine Ring, Vespel
713-028553-103	Confinemt Ring (Radius) V
716-038612-003-B	Dc Bias Pin
715-009657-001	Edge, Ring
715-018991-206	Electrode (Str, 5 mil)
715-009394-001	Electrode
715-18991-208	Electrode, 5 MIL 8"
715-007469-002	Electrode, Anode, Al
715-11531-015	Electrode, AL, Anodized
715-8721-001-M	Electr,HD Blk Anodize,5 M
715-11531-008	Electrode, Upper (3 MIL)
715-011640-006	Focus, Ring Alum
713-011545-002	Guide, Spring
713-037069-003	Hanger
713-011980-001	Housing, Plunger (KEL-F)
713-330704-001	Housing, Sprg, BAC, Vesp
713-011575-001	Kel-f Retainer
857-027108-001	Kit, Choke Ring
857-027108-100	Kit, Choke Ring
715-032720-006	Lift, Base Assy
713-034965-001	Pad
715-009161-001	Pin, Lifter (4 pins)
715-011622-001	Pin, Lifter (4pin/Anodize)
715-330706-001	Pl, End, Bac
839-039317-003	Plug (With Spring)
716-020931-030	Plunger, Ceramic
713-020911-102	Plunger, Upper, (KEL-F)
713-011574-001	Plunger, Wafer Clamp
716-005773-006	Ring, Focus, Ceramic
715-330000-090-A	Ring, Gas, AL 6061 T6
715-330984-001	Ring, Gas Inject, AL
713-072728-130	Ring, Htsnk, Esc/Cplng, 300
716-006721-001	Ring Insulator,Cer
726-096563-062	Ring, Retain, Int,5/8" Bore
713-028553-001-M	Ring, Virgin Teflon
715-330166-003	Rod, Cover, BAC
720-009530-016	Screw,Fl Hd,1"X1/4-20,KEL
720-009943-010	Scr, Kel-F,10-32 X 5/8
720-009531-010	Scr, Kel-F,6-32 X 5/8
720-009426-001	Scr, Set, SS, Self Lock
720-093814-008	Screw,Skt HD,6-32X1/2
720-093815-006	Scr,Vespel Sp1,Fl Hd 6-32
713-011578-001	Sleeve,Plngr Guide
723-097218-001	Spacer, BAC
713-330703-001	Stem, Vespel
715-11531-102	Uppr Electr,(2Mil),Straig
713-034964-001	Washer
713-011577-001	Washer, Clamp, Kel-f
715-075954-003	Washer, Hex, Ring, Clamp, 300MM
857-065064-004	Gasket
857-065064-005	Gasket
714-072727-048	Gasket
714-072728-003	Gasket
713-073439-010	Gasket
713-083687-001	Gasket
713-066269-002	Gasket
713-066825-001	Gasket
857-050466-008	Gasket
713-069935-003	Gasket, Guard, Outer Elctd
713-072792-003	Gasket, Guard, Outer Elctd
857-085550-011	Kit, Gasket,Elctd
857-072806-005	Kit, Gasket,Elctd
857-073299-001	Kit, Gasket, Top, Elctd
P/N	Description	Documentation

P/N	Description	Documentation
CMP - PVA - 016	EPO Series F*Rex
CMP - PVA - 029	EPO 222
CMP - PVA - 026	F*Rex
CMP - PVA - 018	F*Rex-300 series
CMP - PVA - 019	F*Rex-300 series
CMP - PVA - 017	EPO Series
CMP - PVA - 030	F*Rex
P/N	Description	Documentation

P/N	Description	Documentation
310C0028-01	Actuator Valve Assembly
16730-01	Board Optical Tach Sensor
60709	Switch Reed - 3Watt - 120Volts
61567-01	Micro Switch
73029	Start/Stop Switch
61501-04	Heater Cartridge - 375W - 220V and 115V
60270-220	Heater Blanket
A190-60M-0215	Rotor Q/D - Cassette
A72-50M-0215	Rotor
N/A	328 Brushed Controllers
N/A	102 Brush-less - Controllers
N/A	102 - Controllers
N/A	101 - Controllers
N/A	260 - 270 - 280 - Bowls
17438-01	Door Seal 260
121R0001-552 e 17438-03	Door Seal 270
121R0001-553 e 17438-05	Door Seal 280
70738-F	Ferrofluidic Fluid
61206	Grommets (Drain)
115R004-501	Static Eliminator
17359-01	Direct Drive Motor - ½ HP - 90VDC
17410-01	Motor - ½ HP Brushless - 120 VDC (230VAC)
61510	Pressure Switch
61326-05	Resistivity Probe
60272	Brake RH-50 - Resistor
Z573R0020-03	QD Rotor - CAP Screw
70738	Seal Ferrofluidic
10777-1	"F" Brushed - Rear Bowl Seal
116R0020-03	S" Brushed - Rear Bowl Seal
116R0002-01	Rear Bowl Seal
341R0010-03	High Flow DI - Spray Nozzles
242R0006-01	Labyrinth (non-contact) Seal
240C0001-01	Labyrinth (non-contact) Seal
61591	24V "S" - Solenoid Valve
12020-01	Valve - 2-stage di Teflon/PVC
R110-01	Valve - 2-stage N2Teflon/PVC
R108-04	Valve - 3-stage diTeflon/PVC
17446-507, 508	2300 Universal 8 hole
17446-501	260 Left Hinge
17446-502	260 Right Hinge
17446-501, 17446-502	260 Universal Thick lipped
17446-503, 17446-504	270 Universal
17446-503	270 Left Hinge
17446-504	270 Right Hinge
17446-505, 17446-506	280 Universal 6-hole
17143-501	RSP/Indexer 280-2300
17143-01	RSP/Indexer 240-270
253R0022-01	RSP Slow Acting 240-270
253R0014-01	RSP Slow Acting 240-270
122R0002-501	Door Left, 270 "S"
122R0002-502	Door Right, 270 "S"
354R0001-503	Manifold N2, 260/270
351R0004-01	Manifold Spray 8 Nzl Teflon Flaretek
62730-01	Damper Vibration
70886-10	Stainless Steel .01 Micron Disposable - Filter Cartridge
P/N	Description	Documentation

P/N	Description	Documentation
AVE-2001	Process Chamber Gate Valves 200mm
02-117255-00	ASSY, PS FLOW METER
02-142638-00	ASSY, FLOW SNSR, 50ML, EBR, BSE
02-142639-00	ASSY, FLOW SNSR, 12ML, EBR, BSE
02-142640-00	ASSY,FLOW SNSR, 12ML, EBR, FSA
02-253636-01	ASSY, FLOWMETER, SAC CELL
02-273492-00	ASSY,DIFFUSER,EASY WET 11.4ID,300MM NEXT
02-288359-00	ASSY,DIFFUSER,EASY WET 11.75ID,300MM NEXT
02-350453-00	ASSY, CNTCTR, FLUID, DOSING DEGASSIER
02-294406-00	EXTREME CATIONIC MEMBRANE ASSY
15-119067-00	MODIFIED CUP, END EFFECTOR
15-173189-00	CUP, VAC, 300MM ANNEAL, VESPEL
15-253122-00	ANODE, 200MM
15-253122-00	ANODE, 200MM
15-259750-01	ANODE, 300MM
15-259750-02	ANODE, BOLT DOWN, GROOVED, 300MM
15-293935-00	ANODE, 300MM
15-294620-01	ANODE,300MM,EXTREME CELL
16-270993-00	CHUCK, 300MM (REFURBISHMENT ONLY)
15-302588-00	MEMBRANE,CATIONIC,NEXT CELL, N324
16-284614-00	MEMBRANE, SAC 300MM
16-285065-00	MEMBRANE, SAC 200MM
15-365387-00	SNUBBER, WAFER
17-115725-00	SNUBBER, WAFER
17-130766-00	CONTACT WAFER 196MM
17-318098-00	CONTACT,1MM,APC,N6
17-132974-00	WAFER CONTACT TIP 296MM
22-250136-00	SEAL, CUP, PISTON
22-122198-00	SEAL, VACUUM OUTER, 200MM
SEAL, VACUUM INNER, 200MM	22-122199-00
22-252111-00	INLINE FILTER
22-252112-00	FILTER FRIT
34-278028-01	SENSOR, FLOW, 0-5 LPM, SAC, CELL 1
61-278378-01,02,03	MOD, PUMP, FG DRIVE, O-RING, SAC
34-336495-01	SENSOR, FLOW, 0.5-5 LPM, SAC, CELL
61-308597-00	SAC Back Valve
34-291572-00	SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR
34-291573-00	SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR
34-291574-00	SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR
60-170110-00	F101 Clamshell Closed Regulator
61-323044-00	FLOW SWITCH ASSY
61-323053-00	FLOW SWITCH ASSY
61-323054-00	FLOW SWITCH ASSY
61-323056-00	FLOW SWITCH ASSY
61-323058-00	FLOW SWITCH ASSY
61-327620-00	FLOW SWITCH ASSY
61-327621-00	FLOW SWITCH ASSY
61-327622-00	FLOW SWITCH ASSY
61-327623-00	FLOW SWITCH ASSY
61-327623-00	FLOW SWITCH ASSY
61-327623-00	FLOW SWITCH ASSY
61-327624-00	FLOW SWITCH ASSY
61-327625-00	FLOW SWITCH ASSY
61-327626-00	FLOW SWITCH ASSY
61-327627-00	FLOW SWITCH ASSY
61-327792-00	FLOW SWITCH ASSY
61-327794-00	FLOW SWITCH ASSY
61-327800-00	FLOW SWITCH ASSY
61-327804-00	FLOW SWITCH ASSY
61-327807-00	FLOW SWITCH ASSY
61-327808-00	FLOW SWITCH ASSY
61-327809-00	FLOW SWITCH ASSY
61-327810-00	FLOW SWITCH ASSY
61-370039-01	FLOW SWITCH ASSY
61-370039-02	FLOW SWITCH ASSY
61-370039-03	FLOW SWITCH ASSY
61-370044-01	FLOW SWITCH ASSY
61-370044-02	FLOW SWITCH ASSY
61-370044-03	FLOW SWITCH ASSY
61-417276-00	FLOW SWITCH ASSY
61-417277-00	FLOW SWITCH ASSY
19-253026-00	PUMP
19-261477-00	PUMP
27-270106-01	PUMP, VMS, 5.5GPM, 3/8 FLARE, BEARINGLESS
27-270106-02	PUMP, VMS, 5.5GPM, 3/8 FLARE, BEARINGLESS
34-265947-00	LAMP
27-307375-01	PUMP, DOSING
27-307375-02	PUMP, DOSING
27-307375-03	PUMP, DOSING
27-312976-01	PUMP, DOSING
27-312976-02	PUMP, DOSING
27-312976-03	PUMP, DOSING
27-338508-01	PUMP, DOSING
27-338508-02	PUMP, DOSING
27-338508-03	PUMP, DOSING
27-359552-01	PUMP, DOSING
27-369552-02	PUMP, DOSING
27-359552-03	PUMP, DOSING
27-359552-04	PUMP, DOSING
22-153536-00	O-RING, TEFLON ENCAP VITON
22-260328-00	O-RING,MLD,MV75-01B,.103,11.180,BKSIDE
15-032014-01	Quartz Window
15-00309-00	Bolt, Showerhead
15-00475-00	Feedthru, Ceramic
15-00578-00	Feedthru, Ceramic
16-00092-00	Feedthru, Heater
15-00685-00	Feedthru, Al
15-107698-00	Feedthru, Cer, 99.5%
15-00483-00	Ring, Ceramic
15-00484-00	Ring, Heater, Centering
15-00558-01	Sleeve, Heater
15-00558-02	Ceramic, Heater
15-00567-00	Tube, TC 1/8" ID, Cer
15-00653-00	Clamp, HSG
15-00700-00	Spindle, Btm Plate, 200mm
15-00701-00	Spindle, Bottom
15-00703-00	Spindle, Top
15-024881-00	Cap, End, Fork
15-108174-00	Cap, RF, Strap
15-032016-00	Pin,Cer,Vent for Htr Bloc
15-032631-00	Spindle, Flange (anodized)
15-101482-01	Spindle, Top Plate, 200mm
15-00699-01	Finger, Flat (150mm)
15-053394-01	Finger, w/ Nibs (150mm)
15-053394-02	Finger, w/Nibs (200mm)
15-108307-00	Bracket, RF Strap
16-00098-00	Wire, Insultd Cer Bead, L
15-00399-02	Screw, Hex, 8-32x.96 Ni
15-00399-03	Screw, (.55 long) Ni200
15-00399-04	Screw, (1.02" long) Ni200
15-00399-05	Screw, (1.12" long) Ni200
15-00457-00	Screw, Htr Strap
15-00341-00	Screw, 1/4-20
15-00686-00	Screw, Fork
15-114331-00	Screw, 1/4-20 (.50)
15-119059-00	Screw, SKT Hex,1/4-20x.25
16-00092-00	Nut, 1/2-20 Aluminum
15-00371-00	Nut, Htr Strap, 1/4-28 Ni
15-00371-00	Nut, NI, 1/4-20
15-00385-00	Nut, Ni
15-00686-00	Feedthru, Washer, Al
15-00951-00	Cup, Screw Cover
15-00372-00	Washer, Heater
15-00729-00	Washer, Flange
15-00721-00	# 8 NI Washer, Fork Assy
15-00386-00	Washer, Nut
Al 1050	Heater Table
Al 5052	Heater Table
CMP - PVA - 027	IPEC 776
CMP - PVA - 028	Auriga
P/N	Description	Documentation

P/N	Description	Documentation
N/A	Eclipse Hybrid Bearing Latch
N/A	Eclipse Cathode Rotation Options
N/A	Eclipse Disposable Uni-Pod Shield
N/A	Eclipse Wafer Holder Rebuild Program
N/A	Disposable Shield kit Program
A-100273-C	Bellows Front Cover
A-119576-C	Bellows Front Cover
818-27-100	Etch Bellows
A-110139	Bellows Back Plane
P/N	Description	Documentation

P/N	Description	Documentation
N/A	DF-4/DF-5/CF-4/CF-5/DF-3000/350D/300XP
N/A	80-10/120-10/120XP
N/A	E220/E500
N/A	E220/E500HP
N/A	160XP/180XP/VIISion200
N/A	E1000
N/A	Viision
N/A	Vista 810XE
68090901	Pressure Plate Ram Bellows
67827401.O	Wafer Load Lock Bellows
00-680547-00	Load Lock Ram Bellows
N/A	Load Lock Ram Bellows
E17094630	Beam Gate Bellows
E19000070	Extraction Bellows
P/N	Description	Documentation

P/N	Description	Documentation
N/A	NV20/GSD/GSD HE
N/A	8200
N/A	NV/10-80/NV10-160/GSD Ultra
N/A	GSDIII/LED/Ultra/HC3
N/A	Kasper/3206/6200
17161640	Chamber Bellows
11044900	Rotatable Bellows
19S0274	V3 Bellows
1906890	Wafer Holder Bellows
19S0170	Bellows Seal Rough Line
1906850	Arm Bellows
19S0217	Elevator Bellows
0475-0015-003	Bellows
P/N	Description	Documentation

P/N	Description	Documentation
BF6-2042-00	CERAMIC END EFFECTORS
BF6-2043-00	CERAMIC END EFFECTORS
58-MA-7415 RD	THERMOCOUPLE
P/N	Description	Documentation

Request quote: sales@smg-technology.com

SMG Technology Innovations is committed to supporting our clients; spare parts, products and equipment, will be delivered at the correct time.
Today our company has made significant investments to garantee the high quality our global spares and logistics capabilities by moving both support and spare parts closer to you. In addition, we offer a fast service to meet the needs of customers facing critical system downtime.

Info@smg-technology.com and get in touch with our dealer near you.

* SMG manages the sales in the best centers, whit a team member located in each area of interest.

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November 2022

SEMICON EUROPE - 2022

We're heading to Semicon Europe! You are there?
Nov 15–18, 2022 | MESSE MÜNCHEN.
You will see our main market products and our services,
you will find our experts ready for an interesting meeting.

Send an email to: info@smg-technology.com and book your meeting.

SMG Technology Innovations specialized in Endura™ PVD, Centura™ Etch, Centura Ultima HDPCVD, and Ultima+, Centura CVD LH, DxZ, WxZ, Etchback Centura EPI, Centura RTP ISSG, DPN, Xe+, Producer™ , P5000™ systems.

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A company born to support Semiconductor Industries in the various production areas.

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