We are committed to delivering solutions that combine technological excellence, efficiency, and value. Our deep dedication to research and development allows us to anticipate market challenges, developing advanced technologies and processes that deliver tangible results.
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Our company offers a variety of spare parts/second source, process controls to monitor operations, products and services
to restore and improve production machinery, dedicated to the 150/200 mm wafers production, reducing waste increasing production standards.Process controlsBrowse servicesCOMPLETE SOLUTIONS
TO INCREASE PRODUCTION
Efficiency and equipment uptime. -
TECHNOLOGY,
MEETS INNOVATION.
Inspirations for a sunny future.Technology and Innovation at SMG means ideas of creating progress in automation, well-being and safety.
They can be products, solutions and services that set a benchmark – both in the world of technology and beyond.
Read more about usContact us -
We provide preventive maintenance services matched to the customer's needs
in order to maintain equipment performance and to ensure stable operation.Preventive Maintenance
Consultancy service
and On site TrainingKnow more aboutContact us
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"Specialized Solutions for the Maritime
Aeronautical, and Industrial Sectors"Cutting-edge technical expertise and in-depth knowledge.Precise and reliable solutions for the repair and maintenance of gyrocompasses.
Our experience allows us to successfully address challenges in the maritime, aeronautical, and industrial sectors.Read moreContact Us
A company born to support Semiconductor Industries in the various production areas.
With a Core business focused on Spare parts for semiconductor industries: AMAT 150mm, P5000 AMAT 200mm, SEZ, SPXX, Endura / DxZ / Producer / HDP / DPS / MxP / CMP, AMAT 300mm CMP / Producer SE, Clusterline - Evatec® and many other equipments. Through years of experience we have developed a database and knowledge of most equipment in the Market, we can cross reference most second source part number for industrial automations that feed your wafer production.
Browse products list
SMG Technology Innovations operates a range of services, to help our customers find the right part and to get their high value items, spare parts repaired or second source.
• Search online by part number or name, using the search engine below,
• View the available OEM parts, alternative qualified parts, and any repairs available,
• Contact SMG directly for a quotation, or email us to source what you cannot find.
• Search online by part number or name, using the search engine below,
• View the available OEM parts, alternative qualified parts, and any repairs available,
• Contact SMG directly for a quotation, or email us to source what you cannot find.
- AMAT
- LAM
- EBARA
- SEMITOOL
- NOVELLUS
- MRC ECLIPSE
- VARIAN
- EATON
- CANON
| wdt_ID | P/N | Description |
|---|---|---|
| 1 | 0015-09055 | Susceptor Lift Bellows |
| 2 | 0015-09056 | Wafer Lift Bellows |
| 3 | 0020-06047 | Bearing, Throttle Valve |
| 4 | 0020-06048 | Bearing, Throttle Valve |
| 5 | 0020-10811 | Pipe, Insulator, Vespel |
| 6 | 0020-22413 | Slit Valve Bellows |
| 7 | 0020-31628 | Ring, Insulator, Ardel 100 |
| 8 | 0020-33785 | Gas Dist Plate 64 Holes |
| 9 | 0021-01004 | Screw, Face Plate, AL |
| 10 | 0021-01568 | Scr, BlockerPlt, Bright-Dip |
| P/N | Description |
| P/N | Description | Documentation |
|---|---|---|
| 839-250568-001 | Bellows Lower Electrode | |
| CMP - PVA - 027 | DSS | |
| CMP - PVA - 032 | All On Trak | |
| 713-027299-002 | Adapter | |
| 839-070842-004 | Assy, Stud, Socket | |
| 839-086924-021 | Assy, Stud, Socket (M) | |
| 839-086924-020 | Assy, Stud, Socket (S) | |
| 715-011913-080 | Baffle Lower, Plate | |
| 715-011925-001 | Bolt, Capped Clamp | |
| 715-011927-001 | Bolt, Capped Clamp | |
| 716-011981-001 | Bottom, Plunger | |
| 713-011926-001 | Cap, Clamp Bolt (Kel-f) | |
| 713-011928-001 | Cap, (Kel-f) | |
| 715-011982-001 | Cap, Plngr, Al, Anodized | |
| 713-11926-001-V | Cap, Screw, Vespel | |
| 713-330311-001 | Clip, BAC, Vespel | |
| 713-330701-001 | Cone, BAC | |
| 713-028487-001 | Confine Ring, Vespel | |
| 713-028553-103 | Confinemt Ring (Radius) V | |
| 716-038612-003-B | Dc Bias Pin | |
| 715-009657-001 | Edge, Ring | |
| 715-018991-206 | Electrode (Str, 5 mil) | |
| 715-009394-001 | Electrode | |
| 715-18991-208 | Electrode, 5 MIL 8" | |
| 715-007469-002 | Electrode, Anode, Al | |
| 715-11531-015 | Electrode, AL, Anodized | |
| 715-8721-001-M | Electr,HD Blk Anodize,5 M | |
| 715-11531-008 | Electrode, Upper (3 MIL) | |
| 715-011640-006 | Focus, Ring Alum | |
| 713-011545-002 | Guide, Spring | |
| 713-037069-003 | Hanger | |
| 713-011980-001 | Housing, Plunger (KEL-F) | |
| 713-330704-001 | Housing, Sprg, BAC, Vesp | |
| 713-011575-001 | Kel-f Retainer | |
| 857-027108-001 | Kit, Choke Ring | |
| 857-027108-100 | Kit, Choke Ring | |
| 715-032720-006 | Lift, Base Assy | |
| 713-034965-001 | Pad | |
| 715-009161-001 | Pin, Lifter (4 pins) | |
| 715-011622-001 | Pin, Lifter (4pin/Anodize) | |
| 715-330706-001 | Pl, End, Bac | |
| 839-039317-003 | Plug (With Spring) | |
| 716-020931-030 | Plunger, Ceramic | |
| 713-020911-102 | Plunger, Upper, (KEL-F) | |
| 713-011574-001 | Plunger, Wafer Clamp | |
| 716-005773-006 | Ring, Focus, Ceramic | |
| 715-330000-090-A | Ring, Gas, AL 6061 T6 | |
| 715-330984-001 | Ring, Gas Inject, AL | |
| 713-072728-130 | Ring, Htsnk, Esc/Cplng, 300 | |
| 716-006721-001 | Ring Insulator,Cer | |
| 726-096563-062 | Ring, Retain, Int,5/8" Bore | |
| 713-028553-001-M | Ring, Virgin Teflon | |
| 715-330166-003 | Rod, Cover, BAC | |
| 720-009530-016 | Screw,Fl Hd,1"X1/4-20,KEL | |
| 720-009943-010 | Scr, Kel-F,10-32 X 5/8 | |
| 720-009531-010 | Scr, Kel-F,6-32 X 5/8 | |
| 720-009426-001 | Scr, Set, SS, Self Lock | |
| 720-093814-008 | Screw,Skt HD,6-32X1/2 | |
| 720-093815-006 | Scr,Vespel Sp1,Fl Hd 6-32 | |
| 713-011578-001 | Sleeve,Plngr Guide | |
| 723-097218-001 | Spacer, BAC | |
| 713-330703-001 | Stem, Vespel | |
| 715-11531-102 | Uppr Electr,(2Mil),Straig | |
| 713-034964-001 | Washer | |
| 713-011577-001 | Washer, Clamp, Kel-f | |
| 715-075954-003 | Washer, Hex, Ring, Clamp, 300MM | |
| 857-065064-004 | Gasket | |
| 857-065064-005 | Gasket | |
| 714-072727-048 | Gasket | |
| 714-072728-003 | Gasket | |
| 713-073439-010 | Gasket | |
| 713-083687-001 | Gasket | |
| 713-066269-002 | Gasket | |
| 713-066825-001 | Gasket | |
| 857-050466-008 | Gasket | |
| 713-069935-003 | Gasket, Guard, Outer Elctd | |
| 713-072792-003 | Gasket, Guard, Outer Elctd | |
| 857-085550-011 | Kit, Gasket,Elctd | |
| 857-072806-005 | Kit, Gasket,Elctd | |
| 857-073299-001 | Kit, Gasket, Top, Elctd | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| CMP - PVA - 016 | EPO Series F*Rex | |
| CMP - PVA - 029 | EPO 222 | |
| CMP - PVA - 026 | F*Rex | |
| CMP - PVA - 018 | F*Rex-300 series | |
| CMP - PVA - 019 | F*Rex-300 series | |
| CMP - PVA - 017 | EPO Series | |
| CMP - PVA - 030 | F*Rex | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| 310C0028-01 | Actuator Valve Assembly | |
| 16730-01 | Board Optical Tach Sensor | |
| 60709 | Switch Reed - 3Watt - 120Volts | |
| 61567-01 | Micro Switch | |
| 73029 | Start/Stop Switch | |
| 61501-04 | Heater Cartridge - 375W - 220V and 115V | |
| 60270-220 | Heater Blanket | |
| A190-60M-0215 | Rotor Q/D - Cassette | |
| A72-50M-0215 | Rotor | |
| N/A | 328 Brushed Controllers | |
| N/A | 102 Brush-less - Controllers | |
| N/A | 102 - Controllers | |
| N/A | 101 - Controllers | |
| N/A | 260 - 270 - 280 - Bowls | |
| 17438-01 | Door Seal 260 | |
| 121R0001-552 e 17438-03 | Door Seal 270 | |
| 121R0001-553 e 17438-05 | Door Seal 280 | |
| 70738-F | Ferrofluidic Fluid | |
| 61206 | Grommets (Drain) | |
| 115R004-501 | Static Eliminator | |
| 17359-01 | Direct Drive Motor - ½ HP - 90VDC | |
| 17410-01 | Motor - ½ HP Brushless - 120 VDC (230VAC) | |
| 61510 | Pressure Switch | |
| 61326-05 | Resistivity Probe | |
| 60272 | Brake RH-50 - Resistor | |
| Z573R0020-03 | QD Rotor - CAP Screw | |
| 70738 | Seal Ferrofluidic | |
| 10777-1 | "F" Brushed - Rear Bowl Seal | |
| 116R0020-03 | S" Brushed - Rear Bowl Seal | |
| 116R0002-01 | Rear Bowl Seal | |
| 341R0010-03 | High Flow DI - Spray Nozzles | |
| 242R0006-01 | Labyrinth (non-contact) Seal | |
| 240C0001-01 | Labyrinth (non-contact) Seal | |
| 61591 | 24V "S" - Solenoid Valve | |
| 12020-01 | Valve - 2-stage di Teflon/PVC | |
| R110-01 | Valve - 2-stage N2Teflon/PVC | |
| R108-04 | Valve - 3-stage diTeflon/PVC | |
| 17446-507, 508 | 2300 Universal 8 hole | |
| 17446-501 | 260 Left Hinge | |
| 17446-502 | 260 Right Hinge | |
| 17446-501, 17446-502 | 260 Universal Thick lipped | |
| 17446-503, 17446-504 | 270 Universal | |
| 17446-503 | 270 Left Hinge | |
| 17446-504 | 270 Right Hinge | |
| 17446-505, 17446-506 | 280 Universal 6-hole | |
| 17143-501 | RSP/Indexer 280-2300 | |
| 17143-01 | RSP/Indexer 240-270 | |
| 253R0022-01 | RSP Slow Acting 240-270 | |
| 253R0014-01 | RSP Slow Acting 240-270 | |
| 122R0002-501 | Door Left, 270 "S" | |
| 122R0002-502 | Door Right, 270 "S" | |
| 354R0001-503 | Manifold N2, 260/270 | |
| 351R0004-01 | Manifold Spray 8 Nzl Teflon Flaretek | |
| 62730-01 | Damper Vibration | |
| 70886-10 | Stainless Steel .01 Micron Disposable - Filter Cartridge | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| AVE-2001 | Process Chamber Gate Valves 200mm | |
| 02-117255-00 | ASSY, PS FLOW METER | |
| 02-142638-00 | ASSY, FLOW SNSR, 50ML, EBR, BSE | |
| 02-142639-00 | ASSY, FLOW SNSR, 12ML, EBR, BSE | |
| 02-142640-00 | ASSY,FLOW SNSR, 12ML, EBR, FSA | |
| 02-253636-01 | ASSY, FLOWMETER, SAC CELL | |
| 02-273492-00 | ASSY,DIFFUSER,EASY WET 11.4ID,300MM NEXT | |
| 02-288359-00 | ASSY,DIFFUSER,EASY WET 11.75ID,300MM NEXT | |
| 02-350453-00 | ASSY, CNTCTR, FLUID, DOSING DEGASSIER | |
| 02-294406-00 | EXTREME CATIONIC MEMBRANE ASSY | |
| 15-119067-00 | MODIFIED CUP, END EFFECTOR | |
| 15-173189-00 | CUP, VAC, 300MM ANNEAL, VESPEL | |
| 15-253122-00 | ANODE, 200MM | |
| 15-253122-00 | ANODE, 200MM | |
| 15-259750-01 | ANODE, 300MM | |
| 15-259750-02 | ANODE, BOLT DOWN, GROOVED, 300MM | |
| 15-293935-00 | ANODE, 300MM | |
| 15-294620-01 | ANODE,300MM,EXTREME CELL | |
| 16-270993-00 | CHUCK, 300MM (REFURBISHMENT ONLY) | |
| 15-302588-00 | MEMBRANE,CATIONIC,NEXT CELL, N324 | |
| 16-284614-00 | MEMBRANE, SAC 300MM | |
| 16-285065-00 | MEMBRANE, SAC 200MM | |
| 15-365387-00 | SNUBBER, WAFER | |
| 17-115725-00 | SNUBBER, WAFER | |
| 17-130766-00 | CONTACT WAFER 196MM | |
| 17-318098-00 | CONTACT,1MM,APC,N6 | |
| 17-132974-00 | WAFER CONTACT TIP 296MM | |
| 22-250136-00 | SEAL, CUP, PISTON | |
| 22-122198-00 | SEAL, VACUUM OUTER, 200MM | |
| SEAL, VACUUM INNER, 200MM | 22-122199-00 | |
| 22-252111-00 | INLINE FILTER | |
| 22-252112-00 | FILTER FRIT | |
| 34-278028-01 | SENSOR, FLOW, 0-5 LPM, SAC, CELL 1 | |
| 61-278378-01,02,03 | MOD, PUMP, FG DRIVE, O-RING, SAC | |
| 34-336495-01 | SENSOR, FLOW, 0.5-5 LPM, SAC, CELL | |
| 61-308597-00 | SAC Back Valve | |
| 34-291572-00 | SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR | |
| 34-291573-00 | SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR | |
| 34-291574-00 | SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR | |
| 60-170110-00 | F101 Clamshell Closed Regulator | |
| 61-323044-00 | FLOW SWITCH ASSY | |
| 61-323053-00 | FLOW SWITCH ASSY | |
| 61-323054-00 | FLOW SWITCH ASSY | |
| 61-323056-00 | FLOW SWITCH ASSY | |
| 61-323058-00 | FLOW SWITCH ASSY | |
| 61-327620-00 | FLOW SWITCH ASSY | |
| 61-327621-00 | FLOW SWITCH ASSY | |
| 61-327622-00 | FLOW SWITCH ASSY | |
| 61-327623-00 | FLOW SWITCH ASSY | |
| 61-327623-00 | FLOW SWITCH ASSY | |
| 61-327623-00 | FLOW SWITCH ASSY | |
| 61-327624-00 | FLOW SWITCH ASSY | |
| 61-327625-00 | FLOW SWITCH ASSY | |
| 61-327626-00 | FLOW SWITCH ASSY | |
| 61-327627-00 | FLOW SWITCH ASSY | |
| 61-327792-00 | FLOW SWITCH ASSY | |
| 61-327794-00 | FLOW SWITCH ASSY | |
| 61-327800-00 | FLOW SWITCH ASSY | |
| 61-327804-00 | FLOW SWITCH ASSY | |
| 61-327807-00 | FLOW SWITCH ASSY | |
| 61-327808-00 | FLOW SWITCH ASSY | |
| 61-327809-00 | FLOW SWITCH ASSY | |
| 61-327810-00 | FLOW SWITCH ASSY | |
| 61-370039-01 | FLOW SWITCH ASSY | |
| 61-370039-02 | FLOW SWITCH ASSY | |
| 61-370039-03 | FLOW SWITCH ASSY | |
| 61-370044-01 | FLOW SWITCH ASSY | |
| 61-370044-02 | FLOW SWITCH ASSY | |
| 61-370044-03 | FLOW SWITCH ASSY | |
| 61-417276-00 | FLOW SWITCH ASSY | |
| 61-417277-00 | FLOW SWITCH ASSY | |
| 19-253026-00 | PUMP | |
| 19-261477-00 | PUMP | |
| 27-270106-01 | PUMP, VMS, 5.5GPM, 3/8 FLARE, BEARINGLESS | |
| 27-270106-02 | PUMP, VMS, 5.5GPM, 3/8 FLARE, BEARINGLESS | |
| 34-265947-00 | LAMP | |
| 27-307375-01 | PUMP, DOSING | |
| 27-307375-02 | PUMP, DOSING | |
| 27-307375-03 | PUMP, DOSING | |
| 27-312976-01 | PUMP, DOSING | |
| 27-312976-02 | PUMP, DOSING | |
| 27-312976-03 | PUMP, DOSING | |
| 27-338508-01 | PUMP, DOSING | |
| 27-338508-02 | PUMP, DOSING | |
| 27-338508-03 | PUMP, DOSING | |
| 27-359552-01 | PUMP, DOSING | |
| 27-369552-02 | PUMP, DOSING | |
| 27-359552-03 | PUMP, DOSING | |
| 27-359552-04 | PUMP, DOSING | |
| 22-153536-00 | O-RING, TEFLON ENCAP VITON | |
| 22-260328-00 | O-RING,MLD,MV75-01B,.103,11.180,BKSIDE | |
| 15-032014-01 | Quartz Window | |
| 15-00309-00 | Bolt, Showerhead | |
| 15-00475-00 | Feedthru, Ceramic | |
| 15-00578-00 | Feedthru, Ceramic | |
| 16-00092-00 | Feedthru, Heater | |
| 15-00685-00 | Feedthru, Al | |
| 15-107698-00 | Feedthru, Cer, 99.5% | |
| 15-00483-00 | Ring, Ceramic | |
| 15-00484-00 | Ring, Heater, Centering | |
| 15-00558-01 | Sleeve, Heater | |
| 15-00558-02 | Ceramic, Heater | |
| 15-00567-00 | Tube, TC 1/8" ID, Cer | |
| 15-00653-00 | Clamp, HSG | |
| 15-00700-00 | Spindle, Btm Plate, 200mm | |
| 15-00701-00 | Spindle, Bottom | |
| 15-00703-00 | Spindle, Top | |
| 15-024881-00 | Cap, End, Fork | |
| 15-108174-00 | Cap, RF, Strap | |
| 15-032016-00 | Pin,Cer,Vent for Htr Bloc | |
| 15-032631-00 | Spindle, Flange (anodized) | |
| 15-101482-01 | Spindle, Top Plate, 200mm | |
| 15-00699-01 | Finger, Flat (150mm) | |
| 15-053394-01 | Finger, w/ Nibs (150mm) | |
| 15-053394-02 | Finger, w/Nibs (200mm) | |
| 15-108307-00 | Bracket, RF Strap | |
| 16-00098-00 | Wire, Insultd Cer Bead, L | |
| 15-00399-02 | Screw, Hex, 8-32x.96 Ni | |
| 15-00399-03 | Screw, (.55 long) Ni200 | |
| 15-00399-04 | Screw, (1.02" long) Ni200 | |
| 15-00399-05 | Screw, (1.12" long) Ni200 | |
| 15-00457-00 | Screw, Htr Strap | |
| 15-00341-00 | Screw, 1/4-20 | |
| 15-00686-00 | Screw, Fork | |
| 15-114331-00 | Screw, 1/4-20 (.50) | |
| 15-119059-00 | Screw, SKT Hex,1/4-20x.25 | |
| 16-00092-00 | Nut, 1/2-20 Aluminum | |
| 15-00371-00 | Nut, Htr Strap, 1/4-28 Ni | |
| 15-00371-00 | Nut, NI, 1/4-20 | |
| 15-00385-00 | Nut, Ni | |
| 15-00686-00 | Feedthru, Washer, Al | |
| 15-00951-00 | Cup, Screw Cover | |
| 15-00372-00 | Washer, Heater | |
| 15-00729-00 | Washer, Flange | |
| 15-00721-00 | # 8 NI Washer, Fork Assy | |
| 15-00386-00 | Washer, Nut | |
| Al 1050 | Heater Table | |
| Al 5052 | Heater Table | |
| CMP - PVA - 027 | IPEC 776 | |
| CMP - PVA - 028 | Auriga | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| N/A | Eclipse Hybrid Bearing Latch | |
| N/A | Eclipse Cathode Rotation Options | |
| N/A | Eclipse Disposable Uni-Pod Shield | |
| N/A | Eclipse Wafer Holder Rebuild Program | |
| N/A | Disposable Shield kit Program | |
| A-100273-C | Bellows Front Cover | |
| A-119576-C | Bellows Front Cover | |
| 818-27-100 | Etch Bellows | |
| A-110139 | Bellows Back Plane | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| N/A | DF-4/DF-5/CF-4/CF-5/DF-3000/350D/300XP | |
| N/A | 80-10/120-10/120XP | |
| N/A | E220/E500 | |
| N/A | E220/E500HP | |
| N/A | 160XP/180XP/VIISion200 | |
| N/A | E1000 | |
| N/A | Viision | |
| N/A | Vista 810XE | |
| 68090901 | Pressure Plate Ram Bellows | |
| 67827401.O | Wafer Load Lock Bellows | |
| 00-680547-00 | Load Lock Ram Bellows | |
| N/A | Load Lock Ram Bellows | |
| E17094630 | Beam Gate Bellows | |
| E19000070 | Extraction Bellows | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| N/A | NV20/GSD/GSD HE | |
| N/A | 8200 | |
| N/A | NV/10-80/NV10-160/GSD Ultra | |
| N/A | GSDIII/LED/Ultra/HC3 | |
| N/A | Kasper/3206/6200 | |
| 17161640 | Chamber Bellows | |
| 11044900 | Rotatable Bellows | |
| 19S0274 | V3 Bellows | |
| 1906890 | Wafer Holder Bellows | |
| 19S0170 | Bellows Seal Rough Line | |
| 1906850 | Arm Bellows | |
| 19S0217 | Elevator Bellows | |
| 0475-0015-003 | Bellows | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| BF6-2042-00 | CERAMIC END EFFECTORS | |
| BF6-2043-00 | CERAMIC END EFFECTORS | |
| 58-MA-7415 RD | THERMOCOUPLE | |
| P/N | Description | Documentation |
Request quote: sales@smg-technology.com
Your faithful Company operative in:
SMG Technology Innovations is committed to supporting our clients; spare parts, products and equipment, will be delivered at the correct time.
Today our company has made significant investments to garantee the high quality our global spares and logistics capabilities by moving both support and spare parts closer to you. In addition, we offer a fast service to meet the needs of customers facing critical system downtime.
Today our company has made significant investments to garantee the high quality our global spares and logistics capabilities by moving both support and spare parts closer to you. In addition, we offer a fast service to meet the needs of customers facing critical system downtime.
Info@smg-technology.com and get in touch with our dealer near you.
* SMG manages the sales in the best centers, whit a team member located in each area of interest.
Latest News
November 2024
SEMICON EUROPE - 2024
We're heading to Semicon Europe! You are there?
Nov 12–15, 2024 | MESSE MÜNCHEN.
Discover our main products and services,
you will find our team ready for an interesting meeting.
Send an email to: info@smg-technology.com and book your meeting.
Nov 12–15, 2024 | MESSE MÜNCHEN.
Discover our main products and services,
you will find our team ready for an interesting meeting.
Send an email to: info@smg-technology.com and book your meeting.
All rights reserved to SEMICON Europa 2024.
SMG Technology Innovations specialized in Endura™ PVD, Centura™ Etch, Centura Ultima HDPCVD, and Ultima+, Centura CVD LH, DxZ, WxZ, Etchback Centura EPI, Centura RTP ISSG, DPN, Xe+, Producer™ , P5000™ systems.