Remote Plasma Sources – Refurbishment Program

SMG offers an Equivalent to New (ETN) Remote Plasma Source Refurbishment Program for deposition and etch chamber clean processes for Semiconductor and other critical thin film applications.

MKS’ ASTRON® 2L (AX7657 ), 3L (7670 Series) remote plasma sources are critical subcomponents for deposition and etch chamber clean processes, removing process by-product build-up from chamber walls, increasing the life of a process tool and reducing the source of thin film contamination.

Refurbishment Service includes:

While there are design differences between all the MKS remote plasma source models, the primary scope of work includes:  

• Proactive replacement of the electronic circuit boards defined by the corresponding bill of materials with new, original MKS parts
• The covered electronic circuit boards include: Power 
- Control
 - Fuse - Ignition - Boost (when applicable)
• Install new plasma blocks and transformer per the bill of materials of the particular model
• Incorporate applicable Service Bulletins and software upgrades • Repair other problems found
• Thorough testing on an SMG-designed test stand, following the most current manufacturing processes and procedures
• Comprehensive test report

Benefits:

Extended lifespan of the subcomponent.

Reduced risk of downtime due to unexpected failures.

Improved reliability and consistency in processes.

◆ Terms and Conditions:
1. Delivery terms: 2~3 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date