Spare parts – Tools – Equipment

SMG Technology Innovations supplies OEM, second source, tools and products fully compatible for semiconductor industries.
  • Home
  • Spare parts – Tools – Equipment
AMAT® Centura™ RP EPI.

OEM, Second source and refurbished.

SMG delivers fully remanufactured equipment, new parts and retrofits for AMAT®, LAM®, EBARA®, CANON®, DAS®, HITACHI®, TEL®, SEMITOOL®, NOVELLUS®, MRC ECLIPSE®, VARIAN®, EATON®.
SMG also manufactures spare parts specifically developed for:
CVD, CMP, PVD systems.
Our experience comprehensively covers the equipment for semiconductor industries worldwide for more than 20 years. 
The quality is guaranteed by our engineers with more than 25 years of experience, which constantly test and monitor the optimal functioning of our parts to guarantee high quality support.
Core business and Expertise:
SMG specialises in AMAT® Centura™ Etch. Etching of metals, oxides, nitrides, silicon, including DPS Metal, DPS Poly, WxP, ASP, MKII, MxP, MxP+ EMxP+, IPS, Super E and Emax.
AMAT® Centura™ 5200 CVD systems.
AMAT® Centura™ RTP, RTP XE, RTP XE+ and RTP Radiance.
SMG Technology Innovations got's and collaborate in partnership, a variety of new and used semiconductor spare parts from Applied Materials, Lam Research, Novellus and other semiconductor companies.
Our semiconductor spare parts include consumables as well as tool replacement parts.

SMG Technology Innovations operates a range of services, to help our customers find the right part and to get their high value items, spare parts repaired or second source.

• Search online by part number or name, using the search engine below, 
• View the available OEM parts, alternative qualified parts, and any repairs available, 
• Contact SMG directly for a quotation, or email us to source what you cannot find.

Browse other Spare Parts

  • AMAT
  • LAM
◆ Terms and Conditions:
1. Delivery terms: 1~2 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date

Request Spare parts - Equipment - Tools

Send a request our Team will contact You in 24 hours.
We use cookies to deliver you the best experience. By browsing our website you agree to our use of cookies.