AMAT® Centura™ RP EPI.
Spare parts – Tools – Equipment
SMG Technology Innovations supplies OEM, second source, tools and products fully compatible for semiconductor industries.
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- Spare parts – Tools – Equipment
OEM, Second source and refurbished.
SMG delivers fully remanufactured equipment, new parts and retrofits for AMAT®, LAM®, EBARA®, CANON®, DAS®, HITACHI®, TEL®, SEMITOOL®, NOVELLUS®, MRC ECLIPSE®, VARIAN®, EATON®.
SMG also manufactures spare parts specifically developed for:
CVD, CMP, PVD systems.
Our experience comprehensively covers the equipment for semiconductor industries worldwide for more than 20 years.
SMG also manufactures spare parts specifically developed for:
CVD, CMP, PVD systems.
Our experience comprehensively covers the equipment for semiconductor industries worldwide for more than 20 years.
The quality is guaranteed by our engineers with more than 25 years of experience, which constantly test and monitor the optimal functioning of our parts to guarantee high quality support.
Core business and Expertise:
SMG specialises in AMAT® Centura™ Etch. Etching of metals, oxides, nitrides, silicon, including DPS Metal, DPS Poly, WxP, ASP, MKII, MxP, MxP+ EMxP+, IPS, Super E and Emax.
AMAT® Centura™ 5200 CVD systems.
AMAT® Centura™ RTP, RTP XE, RTP XE+ and RTP Radiance.
AMAT® Centura™ 5200 CVD systems.
AMAT® Centura™ RTP, RTP XE, RTP XE+ and RTP Radiance.
SMG Technology Innovations got's and collaborate in partnership, a variety of new and used semiconductor spare parts from Applied Materials, Lam Research, Novellus and other semiconductor companies.
Our semiconductor spare parts include consumables as well as tool replacement parts.
Our semiconductor spare parts include consumables as well as tool replacement parts.
SMG Technology Innovations operates a range of services, to help our customers find the right part and to get their high value items, spare parts repaired or second source.
• Search online by part number or name, using the search engine below,
• View the available OEM parts, alternative qualified parts, and any repairs available,
• Contact SMG directly for a quotation, or email us to source what you cannot find.
• Search online by part number or name, using the search engine below,
• View the available OEM parts, alternative qualified parts, and any repairs available,
• Contact SMG directly for a quotation, or email us to source what you cannot find.
Browse other Spare Parts
- AMAT
- LAM
- EBARA
- SEMITOOL
- NOVELLUS
- MRC ECLIPSE
- VARIAN
- EATON
- CANON
| wdt_ID | P/N | Description |
|---|---|---|
| 1 | 0015-09055 | Susceptor Lift Bellows |
| 2 | 0015-09056 | Wafer Lift Bellows |
| 3 | 0020-06047 | Bearing, Throttle Valve |
| 4 | 0020-06048 | Bearing, Throttle Valve |
| 5 | 0020-10811 | Pipe, Insulator, Vespel |
| 6 | 0020-22413 | Slit Valve Bellows |
| 7 | 0020-31628 | Ring, Insulator, Ardel 100 |
| 8 | 0020-33785 | Gas Dist Plate 64 Holes |
| 9 | 0021-01004 | Screw, Face Plate, AL |
| 10 | 0021-01568 | Scr, BlockerPlt, Bright-Dip |
| P/N | Description |
| P/N | Description | Documentation |
|---|---|---|
| 839-250568-001 | Bellows Lower Electrode | |
| CMP - PVA - 027 | DSS | |
| CMP - PVA - 032 | All On Trak | |
| 713-027299-002 | Adapter | |
| 839-070842-004 | Assy, Stud, Socket | |
| 839-086924-021 | Assy, Stud, Socket (M) | |
| 839-086924-020 | Assy, Stud, Socket (S) | |
| 715-011913-080 | Baffle Lower, Plate | |
| 715-011925-001 | Bolt, Capped Clamp | |
| 715-011927-001 | Bolt, Capped Clamp | |
| 716-011981-001 | Bottom, Plunger | |
| 713-011926-001 | Cap, Clamp Bolt (Kel-f) | |
| 713-011928-001 | Cap, (Kel-f) | |
| 715-011982-001 | Cap, Plngr, Al, Anodized | |
| 713-11926-001-V | Cap, Screw, Vespel | |
| 713-330311-001 | Clip, BAC, Vespel | |
| 713-330701-001 | Cone, BAC | |
| 713-028487-001 | Confine Ring, Vespel | |
| 713-028553-103 | Confinemt Ring (Radius) V | |
| 716-038612-003-B | Dc Bias Pin | |
| 715-009657-001 | Edge, Ring | |
| 715-018991-206 | Electrode (Str, 5 mil) | |
| 715-009394-001 | Electrode | |
| 715-18991-208 | Electrode, 5 MIL 8" | |
| 715-007469-002 | Electrode, Anode, Al | |
| 715-11531-015 | Electrode, AL, Anodized | |
| 715-8721-001-M | Electr,HD Blk Anodize,5 M | |
| 715-11531-008 | Electrode, Upper (3 MIL) | |
| 715-011640-006 | Focus, Ring Alum | |
| 713-011545-002 | Guide, Spring | |
| 713-037069-003 | Hanger | |
| 713-011980-001 | Housing, Plunger (KEL-F) | |
| 713-330704-001 | Housing, Sprg, BAC, Vesp | |
| 713-011575-001 | Kel-f Retainer | |
| 857-027108-001 | Kit, Choke Ring | |
| 857-027108-100 | Kit, Choke Ring | |
| 715-032720-006 | Lift, Base Assy | |
| 713-034965-001 | Pad | |
| 715-009161-001 | Pin, Lifter (4 pins) | |
| 715-011622-001 | Pin, Lifter (4pin/Anodize) | |
| 715-330706-001 | Pl, End, Bac | |
| 839-039317-003 | Plug (With Spring) | |
| 716-020931-030 | Plunger, Ceramic | |
| 713-020911-102 | Plunger, Upper, (KEL-F) | |
| 713-011574-001 | Plunger, Wafer Clamp | |
| 716-005773-006 | Ring, Focus, Ceramic | |
| 715-330000-090-A | Ring, Gas, AL 6061 T6 | |
| 715-330984-001 | Ring, Gas Inject, AL | |
| 713-072728-130 | Ring, Htsnk, Esc/Cplng, 300 | |
| 716-006721-001 | Ring Insulator,Cer | |
| 726-096563-062 | Ring, Retain, Int,5/8" Bore | |
| 713-028553-001-M | Ring, Virgin Teflon | |
| 715-330166-003 | Rod, Cover, BAC | |
| 720-009530-016 | Screw,Fl Hd,1"X1/4-20,KEL | |
| 720-009943-010 | Scr, Kel-F,10-32 X 5/8 | |
| 720-009531-010 | Scr, Kel-F,6-32 X 5/8 | |
| 720-009426-001 | Scr, Set, SS, Self Lock | |
| 720-093814-008 | Screw,Skt HD,6-32X1/2 | |
| 720-093815-006 | Scr,Vespel Sp1,Fl Hd 6-32 | |
| 713-011578-001 | Sleeve,Plngr Guide | |
| 723-097218-001 | Spacer, BAC | |
| 713-330703-001 | Stem, Vespel | |
| 715-11531-102 | Uppr Electr,(2Mil),Straig | |
| 713-034964-001 | Washer | |
| 713-011577-001 | Washer, Clamp, Kel-f | |
| 715-075954-003 | Washer, Hex, Ring, Clamp, 300MM | |
| 857-065064-004 | Gasket | |
| 857-065064-005 | Gasket | |
| 714-072727-048 | Gasket | |
| 714-072728-003 | Gasket | |
| 713-073439-010 | Gasket | |
| 713-083687-001 | Gasket | |
| 713-066269-002 | Gasket | |
| 713-066825-001 | Gasket | |
| 857-050466-008 | Gasket | |
| 713-069935-003 | Gasket, Guard, Outer Elctd | |
| 713-072792-003 | Gasket, Guard, Outer Elctd | |
| 857-085550-011 | Kit, Gasket,Elctd | |
| 857-072806-005 | Kit, Gasket,Elctd | |
| 857-073299-001 | Kit, Gasket, Top, Elctd | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| CMP - PVA - 016 | EPO Series F*Rex | |
| CMP - PVA - 029 | EPO 222 | |
| CMP - PVA - 026 | F*Rex | |
| CMP - PVA - 018 | F*Rex-300 series | |
| CMP - PVA - 019 | F*Rex-300 series | |
| CMP - PVA - 017 | EPO Series | |
| CMP - PVA - 030 | F*Rex | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| 310C0028-01 | Actuator Valve Assembly | |
| 16730-01 | Board Optical Tach Sensor | |
| 60709 | Switch Reed - 3Watt - 120Volts | |
| 61567-01 | Micro Switch | |
| 73029 | Start/Stop Switch | |
| 61501-04 | Heater Cartridge - 375W - 220V and 115V | |
| 60270-220 | Heater Blanket | |
| A190-60M-0215 | Rotor Q/D - Cassette | |
| A72-50M-0215 | Rotor | |
| N/A | 328 Brushed Controllers | |
| N/A | 102 Brush-less - Controllers | |
| N/A | 102 - Controllers | |
| N/A | 101 - Controllers | |
| N/A | 260 - 270 - 280 - Bowls | |
| 17438-01 | Door Seal 260 | |
| 121R0001-552 e 17438-03 | Door Seal 270 | |
| 121R0001-553 e 17438-05 | Door Seal 280 | |
| 70738-F | Ferrofluidic Fluid | |
| 61206 | Grommets (Drain) | |
| 115R004-501 | Static Eliminator | |
| 17359-01 | Direct Drive Motor - ½ HP - 90VDC | |
| 17410-01 | Motor - ½ HP Brushless - 120 VDC (230VAC) | |
| 61510 | Pressure Switch | |
| 61326-05 | Resistivity Probe | |
| 60272 | Brake RH-50 - Resistor | |
| Z573R0020-03 | QD Rotor - CAP Screw | |
| 70738 | Seal Ferrofluidic | |
| 10777-1 | "F" Brushed - Rear Bowl Seal | |
| 116R0020-03 | S" Brushed - Rear Bowl Seal | |
| 116R0002-01 | Rear Bowl Seal | |
| 341R0010-03 | High Flow DI - Spray Nozzles | |
| 242R0006-01 | Labyrinth (non-contact) Seal | |
| 240C0001-01 | Labyrinth (non-contact) Seal | |
| 61591 | 24V "S" - Solenoid Valve | |
| 12020-01 | Valve - 2-stage di Teflon/PVC | |
| R110-01 | Valve - 2-stage N2Teflon/PVC | |
| R108-04 | Valve - 3-stage diTeflon/PVC | |
| 17446-507, 508 | 2300 Universal 8 hole | |
| 17446-501 | 260 Left Hinge | |
| 17446-502 | 260 Right Hinge | |
| 17446-501, 17446-502 | 260 Universal Thick lipped | |
| 17446-503, 17446-504 | 270 Universal | |
| 17446-503 | 270 Left Hinge | |
| 17446-504 | 270 Right Hinge | |
| 17446-505, 17446-506 | 280 Universal 6-hole | |
| 17143-501 | RSP/Indexer 280-2300 | |
| 17143-01 | RSP/Indexer 240-270 | |
| 253R0022-01 | RSP Slow Acting 240-270 | |
| 253R0014-01 | RSP Slow Acting 240-270 | |
| 122R0002-501 | Door Left, 270 "S" | |
| 122R0002-502 | Door Right, 270 "S" | |
| 354R0001-503 | Manifold N2, 260/270 | |
| 351R0004-01 | Manifold Spray 8 Nzl Teflon Flaretek | |
| 62730-01 | Damper Vibration | |
| 70886-10 | Stainless Steel .01 Micron Disposable - Filter Cartridge | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| AVE-2001 | Process Chamber Gate Valves 200mm | |
| 02-117255-00 | ASSY, PS FLOW METER | |
| 02-142638-00 | ASSY, FLOW SNSR, 50ML, EBR, BSE | |
| 02-142639-00 | ASSY, FLOW SNSR, 12ML, EBR, BSE | |
| 02-142640-00 | ASSY,FLOW SNSR, 12ML, EBR, FSA | |
| 02-253636-01 | ASSY, FLOWMETER, SAC CELL | |
| 02-273492-00 | ASSY,DIFFUSER,EASY WET 11.4ID,300MM NEXT | |
| 02-288359-00 | ASSY,DIFFUSER,EASY WET 11.75ID,300MM NEXT | |
| 02-350453-00 | ASSY, CNTCTR, FLUID, DOSING DEGASSIER | |
| 02-294406-00 | EXTREME CATIONIC MEMBRANE ASSY | |
| 15-119067-00 | MODIFIED CUP, END EFFECTOR | |
| 15-173189-00 | CUP, VAC, 300MM ANNEAL, VESPEL | |
| 15-253122-00 | ANODE, 200MM | |
| 15-253122-00 | ANODE, 200MM | |
| 15-259750-01 | ANODE, 300MM | |
| 15-259750-02 | ANODE, BOLT DOWN, GROOVED, 300MM | |
| 15-293935-00 | ANODE, 300MM | |
| 15-294620-01 | ANODE,300MM,EXTREME CELL | |
| 16-270993-00 | CHUCK, 300MM (REFURBISHMENT ONLY) | |
| 15-302588-00 | MEMBRANE,CATIONIC,NEXT CELL, N324 | |
| 16-284614-00 | MEMBRANE, SAC 300MM | |
| 16-285065-00 | MEMBRANE, SAC 200MM | |
| 15-365387-00 | SNUBBER, WAFER | |
| 17-115725-00 | SNUBBER, WAFER | |
| 17-130766-00 | CONTACT WAFER 196MM | |
| 17-318098-00 | CONTACT,1MM,APC,N6 | |
| 17-132974-00 | WAFER CONTACT TIP 296MM | |
| 22-250136-00 | SEAL, CUP, PISTON | |
| 22-122198-00 | SEAL, VACUUM OUTER, 200MM | |
| SEAL, VACUUM INNER, 200MM | 22-122199-00 | |
| 22-252111-00 | INLINE FILTER | |
| 22-252112-00 | FILTER FRIT | |
| 34-278028-01 | SENSOR, FLOW, 0-5 LPM, SAC, CELL 1 | |
| 61-278378-01,02,03 | MOD, PUMP, FG DRIVE, O-RING, SAC | |
| 34-336495-01 | SENSOR, FLOW, 0.5-5 LPM, SAC, CELL | |
| 61-308597-00 | SAC Back Valve | |
| 34-291572-00 | SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR | |
| 34-291573-00 | SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR | |
| 34-291574-00 | SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR | |
| 60-170110-00 | F101 Clamshell Closed Regulator | |
| 61-323044-00 | FLOW SWITCH ASSY | |
| 61-323053-00 | FLOW SWITCH ASSY | |
| 61-323054-00 | FLOW SWITCH ASSY | |
| 61-323056-00 | FLOW SWITCH ASSY | |
| 61-323058-00 | FLOW SWITCH ASSY | |
| 61-327620-00 | FLOW SWITCH ASSY | |
| 61-327621-00 | FLOW SWITCH ASSY | |
| 61-327622-00 | FLOW SWITCH ASSY | |
| 61-327623-00 | FLOW SWITCH ASSY | |
| 61-327623-00 | FLOW SWITCH ASSY | |
| 61-327623-00 | FLOW SWITCH ASSY | |
| 61-327624-00 | FLOW SWITCH ASSY | |
| 61-327625-00 | FLOW SWITCH ASSY | |
| 61-327626-00 | FLOW SWITCH ASSY | |
| 61-327627-00 | FLOW SWITCH ASSY | |
| 61-327792-00 | FLOW SWITCH ASSY | |
| 61-327794-00 | FLOW SWITCH ASSY | |
| 61-327800-00 | FLOW SWITCH ASSY | |
| 61-327804-00 | FLOW SWITCH ASSY | |
| 61-327807-00 | FLOW SWITCH ASSY | |
| 61-327808-00 | FLOW SWITCH ASSY | |
| 61-327809-00 | FLOW SWITCH ASSY | |
| 61-327810-00 | FLOW SWITCH ASSY | |
| 61-370039-01 | FLOW SWITCH ASSY | |
| 61-370039-02 | FLOW SWITCH ASSY | |
| 61-370039-03 | FLOW SWITCH ASSY | |
| 61-370044-01 | FLOW SWITCH ASSY | |
| 61-370044-02 | FLOW SWITCH ASSY | |
| 61-370044-03 | FLOW SWITCH ASSY | |
| 61-417276-00 | FLOW SWITCH ASSY | |
| 61-417277-00 | FLOW SWITCH ASSY | |
| 19-253026-00 | PUMP | |
| 19-261477-00 | PUMP | |
| 27-270106-01 | PUMP, VMS, 5.5GPM, 3/8 FLARE, BEARINGLESS | |
| 27-270106-02 | PUMP, VMS, 5.5GPM, 3/8 FLARE, BEARINGLESS | |
| 34-265947-00 | LAMP | |
| 27-307375-01 | PUMP, DOSING | |
| 27-307375-02 | PUMP, DOSING | |
| 27-307375-03 | PUMP, DOSING | |
| 27-312976-01 | PUMP, DOSING | |
| 27-312976-02 | PUMP, DOSING | |
| 27-312976-03 | PUMP, DOSING | |
| 27-338508-01 | PUMP, DOSING | |
| 27-338508-02 | PUMP, DOSING | |
| 27-338508-03 | PUMP, DOSING | |
| 27-359552-01 | PUMP, DOSING | |
| 27-369552-02 | PUMP, DOSING | |
| 27-359552-03 | PUMP, DOSING | |
| 27-359552-04 | PUMP, DOSING | |
| 22-153536-00 | O-RING, TEFLON ENCAP VITON | |
| 22-260328-00 | O-RING,MLD,MV75-01B,.103,11.180,BKSIDE | |
| 15-032014-01 | Quartz Window | |
| 15-00309-00 | Bolt, Showerhead | |
| 15-00475-00 | Feedthru, Ceramic | |
| 15-00578-00 | Feedthru, Ceramic | |
| 16-00092-00 | Feedthru, Heater | |
| 15-00685-00 | Feedthru, Al | |
| 15-107698-00 | Feedthru, Cer, 99.5% | |
| 15-00483-00 | Ring, Ceramic | |
| 15-00484-00 | Ring, Heater, Centering | |
| 15-00558-01 | Sleeve, Heater | |
| 15-00558-02 | Ceramic, Heater | |
| 15-00567-00 | Tube, TC 1/8" ID, Cer | |
| 15-00653-00 | Clamp, HSG | |
| 15-00700-00 | Spindle, Btm Plate, 200mm | |
| 15-00701-00 | Spindle, Bottom | |
| 15-00703-00 | Spindle, Top | |
| 15-024881-00 | Cap, End, Fork | |
| 15-108174-00 | Cap, RF, Strap | |
| 15-032016-00 | Pin,Cer,Vent for Htr Bloc | |
| 15-032631-00 | Spindle, Flange (anodized) | |
| 15-101482-01 | Spindle, Top Plate, 200mm | |
| 15-00699-01 | Finger, Flat (150mm) | |
| 15-053394-01 | Finger, w/ Nibs (150mm) | |
| 15-053394-02 | Finger, w/Nibs (200mm) | |
| 15-108307-00 | Bracket, RF Strap | |
| 16-00098-00 | Wire, Insultd Cer Bead, L | |
| 15-00399-02 | Screw, Hex, 8-32x.96 Ni | |
| 15-00399-03 | Screw, (.55 long) Ni200 | |
| 15-00399-04 | Screw, (1.02" long) Ni200 | |
| 15-00399-05 | Screw, (1.12" long) Ni200 | |
| 15-00457-00 | Screw, Htr Strap | |
| 15-00341-00 | Screw, 1/4-20 | |
| 15-00686-00 | Screw, Fork | |
| 15-114331-00 | Screw, 1/4-20 (.50) | |
| 15-119059-00 | Screw, SKT Hex,1/4-20x.25 | |
| 16-00092-00 | Nut, 1/2-20 Aluminum | |
| 15-00371-00 | Nut, Htr Strap, 1/4-28 Ni | |
| 15-00371-00 | Nut, NI, 1/4-20 | |
| 15-00385-00 | Nut, Ni | |
| 15-00686-00 | Feedthru, Washer, Al | |
| 15-00951-00 | Cup, Screw Cover | |
| 15-00372-00 | Washer, Heater | |
| 15-00729-00 | Washer, Flange | |
| 15-00721-00 | # 8 NI Washer, Fork Assy | |
| 15-00386-00 | Washer, Nut | |
| Al 1050 | Heater Table | |
| Al 5052 | Heater Table | |
| CMP - PVA - 027 | IPEC 776 | |
| CMP - PVA - 028 | Auriga | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| N/A | Eclipse Hybrid Bearing Latch | |
| N/A | Eclipse Cathode Rotation Options | |
| N/A | Eclipse Disposable Uni-Pod Shield | |
| N/A | Eclipse Wafer Holder Rebuild Program | |
| N/A | Disposable Shield kit Program | |
| A-100273-C | Bellows Front Cover | |
| A-119576-C | Bellows Front Cover | |
| 818-27-100 | Etch Bellows | |
| A-110139 | Bellows Back Plane | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| N/A | DF-4/DF-5/CF-4/CF-5/DF-3000/350D/300XP | |
| N/A | 80-10/120-10/120XP | |
| N/A | E220/E500 | |
| N/A | E220/E500HP | |
| N/A | 160XP/180XP/VIISion200 | |
| N/A | E1000 | |
| N/A | Viision | |
| N/A | Vista 810XE | |
| 68090901 | Pressure Plate Ram Bellows | |
| 67827401.O | Wafer Load Lock Bellows | |
| 00-680547-00 | Load Lock Ram Bellows | |
| N/A | Load Lock Ram Bellows | |
| E17094630 | Beam Gate Bellows | |
| E19000070 | Extraction Bellows | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| N/A | NV20/GSD/GSD HE | |
| N/A | 8200 | |
| N/A | NV/10-80/NV10-160/GSD Ultra | |
| N/A | GSDIII/LED/Ultra/HC3 | |
| N/A | Kasper/3206/6200 | |
| 17161640 | Chamber Bellows | |
| 11044900 | Rotatable Bellows | |
| 19S0274 | V3 Bellows | |
| 1906890 | Wafer Holder Bellows | |
| 19S0170 | Bellows Seal Rough Line | |
| 1906850 | Arm Bellows | |
| 19S0217 | Elevator Bellows | |
| 0475-0015-003 | Bellows | |
| P/N | Description | Documentation |
| P/N | Description | Documentation |
|---|---|---|
| BF6-2042-00 | CERAMIC END EFFECTORS | |
| BF6-2043-00 | CERAMIC END EFFECTORS | |
| 58-MA-7415 RD | THERMOCOUPLE | |
| P/N | Description | Documentation |
◆ Terms and Conditions:
1. Delivery terms: 1~2 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date
1. Delivery terms: 1~2 weeks after PO & product incoming date
2. Payment terms: T/T 30 days after delivery
3. Warranty: 6 month after installation date for repair
4. Validity: 2 years from quotation date
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